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Volumn 66, Issue SUPPL. 1, 1998, Pages
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Analysis of electrical breakdown failures bymeans of SFM-basedmethods
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Author keywords
[No Author keywords available]
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Indexed keywords
BREAKDOWN CHANNEL;
BREAKDOWN CURRENTS;
BREAKDOWN PHENOMENA;
CORRELATED MATERIALS;
DEVICE MODELS;
ELECTRICAL BREAKDOWN;
ELECTRICAL OVERSTRESS;
FLOW CHANNELS;
HIGH RESOLUTION;
MATERIAL FLOW;
MATERIAL TRANSPORT;
PARALLEL DETECTION;
PROTECTION STRUCTURE;
SEM;
SI DEVICES;
SMALL FEATURES;
TOPOGRAPHICAL INFORMATION;
VERTICAL DIRECTION;
CAPACITANCE;
ELECTRIC BREAKDOWN OF LIQUIDS;
ELECTROSTATIC DEVICES;
ELECTROSTATIC DISCHARGE;
ELECTRIC NETWORK ANALYSIS;
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EID: 4243645705
PISSN: 09478396
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/s003390051298 Document Type: Article |
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Times cited : (3)
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References (3)
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