Micromachine-actuator rotated by rarefied gas effects

Thin Solid Films

Volumn 281-282, Issue 1-2, 1996, Pages 651-653

  Kasahara, K ^a   Ota, M ^a   Sakamoto, M ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Carbon; Laser irradiation; Physical vapour deposition; Surface roughness; Surface thermodynamics

Indexed keywords

ALUMINUM; CARBON BLACK; ENGINES; GAS DYNAMICS; LASER BEAM EFFECTS; OPTICAL DEVICES; PRESSURE; ROTORS; SURFACE ROUGHNESS; THERMODYNAMICS; TORQUE; VACUUM;

LASER BEAM GENERATORS; LASER BEAM IRRADIATION; MICRO ROTOR; MICROMACHINE; OPTICAL BEAM GENERATION DEVICES; OPTO MICRO ENGINE; PHYSICAL VAPOUR DEPOSITION; RAREFIED GAS EFFECTS; VACUUM CHAMBER;

ACTUATORS;

EID: 4243622499     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08702-0     Document Type: Article

References (8)

1. T. Hirano et al., Dry released nickel micromotors and their friction characteristics, Digest Techn. Papers Int. Conf. Solid-State Sensors and Actuators, Yokohama, Japan, 1993-1996, pp. 80.
2. M. Ota and N. Kawata, Driving force estimation of opto-micro engines worked by rarefied gas dynamics effects, Proc. 3rd Int. Symp. MicroMachine and Human Science, Nagoya, Japan, 1992, pp. 35-43.
3. E.H. Kennard, Kinetic Theory of Gases, McGraw-Hill, New York, NY, 1938, pp. 327-337.
4. W. Crookes, Proc. Roy. Soc, Vol. 23 (1875) 373-378.
5. N. Kawata and M. Ota, Numerical simulation of rarefied gas dynamics engine performance for a micro-machine, Proc. Int. Symp. Aerospace and Fluid Science, Sendai, Japan, 1993, pp. 602-609.
6. Y. Sone, Rarefied gas dynamics, Japan Soc. Fluid Mechanics, 1979, in Japanese.
7. M. Ota and N. Kawata, Direct simulation of gas flows around rarefied gas dynamics engines for a micro-machine, 19th Int. Symp. on Rarefied Gas Dynamics, Oxford, 1994, pp. 722-728.
8. M. Ota, K. Kasahara and M. Sakamoto, Opto-microengines rotated by rarefied gas dynamic effects, Transaction of Japan Soc. of Mechanical Engineers, Vol. 61, 1995, pp. 2190-2196, in Japanese.