Reactions between SiCl4 and NH3 leading to the formation of silicon nitride powders

Key Engineering Materials

Volumn 132-136, Issue , 1997, Pages 149-152

  Ziegenbalg, Gerald ^a   Focke, Thomas ^a   Holldorf, Horst ^a   Brink, Reinhold ^b   Lange, Horst ^b  

^a TU BERGAKADEMIE FREIBERG   (Germany)

^b BAYER AG   (Germany)

Author keywords

Gas phase synthesis; Hot wall reactor; Mass spectrometric measurements; NH3; Powder preparation; SiCl4; Silazanes; Silicon nitride

Indexed keywords

AMMONIA; CHLORINE COMPOUNDS; MASS SPECTROMETRY; POWDERS; REACTION KINETICS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

SILAZANES;

SILICON NITRIDE;

EID: 4243478785     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Article

References (3)

1. H. Lange, G. Wötting, G. Winter H. ,Angew. Chem. 103 (1991),1606
2. G. Schwier, G. Nietfeld, G.Franz, Mat. Sci. Forum 47 (1989)1
3. G. Boden, R. Irmisch, G.Himpel, T. Reetz,Sprechsaal 122(1989)224