Physical properties of boron-nitride and carbon-nitride films deposited by sputtering

Defect and Diffusion Forum

Volumn 134-135, Issue , 1996, Pages 3-14

  Fusco, G ^a   Giorgis, F ^a   Pirri, C F ^a   Tagliaferro, A ^a   Tresso, E ^a   De Martino, C ^b   Rava, P ^c  

^a POLITECNICO DI TORINO   (Italy)

^b Cyberonics Inc   (Italy)

^c Elettrorava spa Savonera   (Italy)

Author keywords

Boron Nitrogen Alloys; Carbon Nitrogen Alloys; Hard Coating; Structural Properties

Indexed keywords

EID: 4243397313     PISSN: 10120386     EISSN: 16629507     Source Type: Journal    
DOI: 10.4028/www.scientific.net/ddf.134-135.3     Document Type: Article

References (31)

1. J. E. Sundgren, H. T. G. Hentzell, J. Vac. Sci. Technol. A4, 2259 (1986)
2. O. Burat, D. Bouchier, V. Stambouli, G. Gautherin, J. Appl. Phys. 68, 2780 (1990)
3. H. Herchen, M. A. Cappelli, Phys. Rev. B47, 14193 (1993)
4. J. L. Andujar, E. Pascual, R. Aguiar, E. Bertran, A. Bosch, J. L. Fernandez, S. Gimeno, A. Lousa, M. Varela, Diamond and Related Mat. 4, 657 (1995)
5. T. Brozek, J. Szmidt, A. Jakubowski, Diamond and Related Mat. 3, 720 (1994)
6. O. Mishima, K. Era, J. Tanakaa, S. Yamaoka, Appl. Phys. Lett. 53, 952 (1988)
7. J. Szmidt, A. Werbowy, A. Machalski, A. Olszyna, A. Sokolowska, S. Mitura, Diamond and Related Mat. 4, 1131 (1995)
8. C. Mitterer, P. Rodhammer, J. Vac. Sci. Technol. A7, 2646 (1989)
9. M. Mieno, T. Yoshida, Jpn. J. Appl. Phys. 29, L1175 (1990)
10. V. Rigato, M. Spolaore, G. DellaMea, Ion-Solid Interaction for Materials Modification and Processing (Mat. Res. Soc. Symp. Proc. , Pittsburgh, Pennsylvaania, to be published, 1996) vol. 336
11. R. H. Wentzcovitch, S. Fahy, M. L. Cohen, S. G. Louie, Phys. Rev. B 38, 6191 (1988)
12. C. Weissmantel, K. Bewilogua, K. Breuer, D. Dietrich, U. Ebersbach, H. J. Erler, B. Rau, G. Reisse. Thin Solid Films 96, 31 (1982)
13. K. L. Chopra, V. Agarwal, V. D. Vankar, C. V. Deshpandey, R. F. Bunshah, Thin Solid Films 126, 307 (1985)
14. C. Weissmantel, J. Vac. Sci. Technol. 18, 179 (1981)
15. S. Shanfield, R. Wolfson, J. Vac. Sci. Technol. A1, 323 (1983)
16. A. Y. Liu and M. L. Cohen, Phys. Rev. B 41, 10727 (1990)
17. M. Y. Chen, X. Lin, V. P. Dravid, Y. W. Chung, M. S. Wong and W. D. Sproul, Surf. Coat. Technol. 54-55, 360 (1992)
18. F. Demichelis, G. Kaniadakis, A. Tagliaferro, E. Tresso, Appl. Opt 26, 1737 (1987)
19. M. Mieno, T. Yoshida, Surf, and Coating Technol. 32, 87 (1992)
20. V. Y. Kulikovsky, L. R. Shaginyan, V. M. Vereschaka, N. G. Hatynanko, Diamond and Related Mat. 4, 113 (1995)
21. L. Vel, G. Demazeau, J. Etourneau, Mat. science and Engineering, B10, 149 (1991)
22. M. Okamoto, Y. Utsumi, Y. Osaka, Jpn. J. Appl. Phys. 29, L1004 (1990)
23. P. J. Gielisse, S. S. Mitra, J. N. Plendl, R. D. Griffis, L. C. Mansur, R. Marshall, E. A. Pascoe, Phys. Rev. 155, 1039 (1967)
24. R. Geick, C. H. Perry, G. Rupprecht, Phys. Rev. 146, 543 (1966)
25. D. J. Kester, K. S. Ailey, R. F. Davis, Diamond and Related Mat. 3, 332 (1994)
26. P. Broadhead, G. A. Newman, J. Mol. Struct. 10, 157 (1971)
27. A. Weber, U. Bringmann, R. Nikulski, C. P. Klages, Diamond and Related Mat. 2, 201 (1993)
28. J. H. Kaufman, S. Metin, D. D. saperstein, Phys. Rev. B 39, 13053 (1989)
29. F. Demichelis, X. F. Rong, S. Schreite, A. Tagliaferro, C. DeMartino, Diamond and Related Mat. (1995)
30. S. Neuville, A. Tagliaferro, Y. Bounouh, S. Vallon, R. Etemadi, J. Perrin, LeVide, Sciences, techniques et applications, 275, 64 (1995)
31. J. Robertson, Diamond and Related Mat. 4, 297 (1995)