Improved uniformity of multielement thin films prepared by off-axis pulsed laser deposition using a new heater design

Review of Scientific Instruments

Volumn 67, Issue 9, 1996, Pages 3229-3237

  Cillessen, J F M ^a   De Jong, M J M ^a   Croize X ^a,b  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4243192654     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147447     Document Type: Article

References (18)

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8. Specification SiC-Silit heating elements, type VE; Cesiwid Electrowärme GmbH, Erlangen, Germany.
9. We used commercially available sintered high-density SiC-10% Si disks.
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14. 3 films have been grown from PbO-enriched targets at 587°C.
15. Beside the pressure during the ablation process, the cosine power is dependent on the wavelength, fluence, and the target imprint area. Minor changes of these parameters in comparison to reported values, however, cannot explain the large variation of distributions found in the literature.
16. J. C. S. Kools, thesis, University Eindhoven, 1992.
17. The fact that the chemical composition is constant across 2 in. substrates (i.e., a uniform refractive index) validates the use of the optical scanning technique to monitor the relief map of films for the ellipticity analysis.
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