Kinetic model of an RF discharge in oxygen

Australian Journal of Physics

Volumn 49, Issue 6, 1996, Pages 1169-1180

  Dai, X J ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4243155402     PISSN: 00049506     EISSN: None     Source Type: Journal    
DOI: 10.1071/PH961169     Document Type: Article

References (27)

1. Brown, S. C. (1966). Introduction to Electrical Discharges in Gases' (John Wiley: New York).
2. Charles, C., and Boswell, R. W. (1995). J. Vac. Sci. Technol. A 13, 2067.
3. Dai, X. J. (1995). Ph.D. Thesis, Australian National University.
4. Dai, X. J., Hamberger, S. M., and Bean, R. A. (1995). Aust. J. Phys. 48, 939-51.
5. Delcroix, J. L. (1968). 'Plasma Physics', Vol. 2 (John Wiley: New York).
6. Donnelly, I. J., and Rose, E. K. (1990). Aust. J. Phys. 43, 45.
7. Dreicer, H. (1960). Phys. Rev. 117, 343.
8. Fehsenfeld, F. C., Ferguson, E. E., and Schmeltekopf, A. L. (1966). J. Chem, Phys. 45, 1844.
9. Foner, S. N., and Hudson, R. L. (1956). J. Chem. Phys. 25, 601.
10. Fournier, G. (1983). 'Reactive dans les Plasmas' (Paris).
11. Frimer, A. A. (1985). 'Singlet Oxygen', Vol. 1 (CRC Press: Boca Raton, Fla.).
12. Glockler, G., and Lind, S. C. (1939). 'The Electrochemistry of Gases and other Dielectrics' (John Wiley: New York)
13. Gousset, G., Touzeau, M., Vialle, M., and Ferreira, C. M. (1989). Plasma Chem. Plasma Proc. 9, 189-206.
14. Ichikawa, Y., Wu, R. L. C., and Kanada, T. (1989). J, Appl. Phys. 67, 108.
15. Konishi, A., Wakiya, K., Yamamoto, M., and Suzuki, H. (1970). J. Phys. Soc. Jpn 29, 526.
16. Laska, L., Masek, K., and Ruzicka, T. (1979). Czech. J. Phys. B 29, 498.
17. Lee, C., Vahedi, V., and Lieberman, M. A. (1993). Proc. Conf. on Gaseous Electronics, Montreal.
18. Lieberman, M. A., and Lichtenberg, A. J. (1994). 'Principles of Plasma Discharges and Materials Processing' (John Wiley: New York).
19. Luft, P. E. (1975). JILA Information Center Rep. No. 14, University of Colorado, Boulder.
20. Masek, K., and Laska, L. (1980). Czech. J. Phys. B 30, 805.
21. Masek, K., Laska, L.} and Ruzzcka, T. (1978). Czech. J. Phys. B 28, 1321-34.
22. Pace, P., and Lacombe, M. (1978). IEEE J. Quant. Elect. QE-14, 263-74.
23. Rapp, D., and Briglia, D. D. (1965). J. Chem. Phys. 43,1480-9.
24. Rapp, D., and Englander-Golden, P. (1965). J. Chem. Phys. 43, 1464-79.
25. Rundle, H. W., Clark, D. R., and Deckers, J. M. (1973). Can. J. Phys. 51, 144.
26. Sabadil, H., and Pfau, S. (1985). Plasma Chem. Plasma Proc. 5, 67.
27. Wills, C., Boyd, A., Young, M., and Armstrong, D. (1970). Can. J. Chem. 48, 1505-14.