Reduction of ion beam induced and atmospheric ageing of porous silicon using Al and SiO2 caps

Journal of Physics D: Applied Physics

Volumn 29, Issue 6, 1996, Pages 1580-1586

  Giaddui, T ^a   Forcey, K S ^a   Earwaker, L G ^a   Loni, A ^b   Canham, L T ^b   Halimaoui, A ^c  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^b DRA   (United Kingdom)

^c ORANGE LABS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; ALUMINUM; AUGER ELECTRON SPECTROSCOPY; CARBON; CHEMICAL VAPOR DEPOSITION; EVAPORATION; ION BOMBARDMENT; OPTICAL PROPERTIES; OXYGEN; POROUS SILICON; SILICON COMPOUNDS; SILICON WAFERS;

ATMOSPHERIC AGEING; EVAPORATED ALUMINUM SURFACE CAPPING LAYERS; MESOPOROUS MORPHOLOGY; MICROPOROUS POROSITY; PHOTO ILLUMINATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

ION BEAMS;

EID: 4243135186     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/6/025     Document Type: Article

References (18)

1. Canham L T 1990 Appl. Phys. Lett. 57 1046
2. Halimaoui A 1994 Porous silicon science and technology Proc. Int. Winter School Luminescence of Porous Silicon and Si Nanostructure (Les Houches 1994) (Berlin: Springer)
3. Canham L T, Houlton M R, Leong W Y, Pickering C and Keen J M 1991 J. Appl. Phys. 70 422
4. Loni A, Simons A J, Canham L T, Philips H and Earwaker L G 1994 J. Appl. Phys. 76 2825
5. Loni A, Simons A J, Calcott P D J and Canham L T 1995 J. Appl. Phys. 77 3557
6. Xie Y H, Wilson W L, Ross F M, Mucha J A, Fitzgerald E A, Macaulay J M and Harris T D 1992 J. Appl. Phys. 71 2403
7. Grosman A, Ortega C, Siejka J and Chamarro M 1993 J. Appl. Phys. 74 1992
8. Sabet-Dariani R, Haneman D, Hoffman A and Cohen D D 1993 J. Appl. Phys. 73 2321
9. Earwaker L G, Briggs M C, Nasir M I, Farr J P G and Keen J M 1992 Nucl. Instrum. Methods Phys. Res. B 66 23
10. Siegele R, Mauger H K, Lockwood D J, Bruskiewics B, Forster J S and Andrews H R 1995 Solid State Commun. 93 833
11. Ito T and Hiraki A 1993 J. Luminescence 57 331
12. Fu J S, Mao J C, Wu E, Jia Y Q, Zhang B R, Zhang L Z, Qin G G, Wui G S and Zhang Y H 1993 Appl. Phys. Lett. 63 13
13. Tischler M A, Collins R A, Stathis J H and Tsang J C 1992 Appl. Phys. Lett. 60 639
14. Mauckner G, Thonke K and Sauer R 1993 J. Phys.: Condens. Matter 5 L9-L14
15. Pavesi L, Ceschuni M, Mariotto G, Zanghellini E, Bisi O, Anderle M, Calliari L, Fedrizzi M and Fedrizzi L 1994 J. Appl. Phys. 75 2
16. Simpson J C B and Earwaker L G 1986 Surf. Coat. Technol. 27 41
17. Bird J R and Williams J S (ed) 1989 Ion Beams for Materials Analysis (New York: Academic)
18. Simpson J C B and Earwaker L G 1986 Nucl. Instrum. Methods Phys. Res. B 45 622