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Volumn 35-36, Issue PART 1, 1980, Pages 249-254

Laser annealing of glow discharge amorphous silicon

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS - APPLICATIONS; SEMICONDUCTING FILMS - HEAT TREATMENT;

EID: 4243096758     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(80)90602-X     Document Type: Article
Times cited : (10)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.