Fabrication of indium tin oxide (ITO) thin films by spin-coating deposition method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6674, Issue , 2007, Pages

  Psuja, P ^a   Strek, W ^a  

^a INSTITUTE OF LOW TEMPERATURE AND STRUCTURE RESEARCH   (Poland)

Author keywords

ITO; Nanocrystallites; Spin coating; TCO; Thin films

Indexed keywords

DEPOSITION; NANOCRYSTALLITES; SPIN COATING; TIN OXIDES;

INDIUM TIN OXIDE (ITO); PECHINI METHOD; TRANSPARENT CONDUCTIVE OXIDE (TCO);

THIN FILMS;

EID: 42149190143     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.735714     Document Type: Conference Paper

References (18)

1. H. D. Jang, Ch. M. Seong, Song. H. K. Chang, H. C. Kim, Synthesis and characterization of indiumtin oxide (ITO) nanoparticles, Current Applied Physics 6 (2006) pp. 1044-1047.
2. A. Mohammadi-Gheidari, E. Asl Soleimani, M. Mansorhoseini, S. Mohajerzdeh, N. Madani, W. Shams-Kolahi, Structural properties of indium tin oxide thin films prepared for application in solar cells, Materials Research Bulletin 40 (2005) pp. 1303-1307.
3. N. Al.-Dahoudi, H. Bisht, C. Gobbert, T. Krajewski, M. A. Aegerter, Transparent conducting, antistatic and anti-static-anti-glare coatings on plastic substrates, Thin Solid Films 392 (2001) pp. 299-304.
4. N. AI-Dahoudi, M. A. Aegerter, Wet Coating Deposition of ITO Coatings on Plastic Substrates, J. of Sol-Gel Science and Technol. 26 (2003) pp. 693-697.
5. C. Gobbert, H. Bisht, N Al-Dahoudi, R. Nonninger, M. A. Aegerter, Wet Chemical Deposition of Crystalline, Redispersable ATO and ITO Nanoparticles, Journal of Sol-Gel Science and Technology 19 (2000) pp. 201-204.
6. K-H. Song, S-C. Park, J-G. Nam, Indium oxide powder, method for preparing the same, and method for manufacturing high-density indium tin oxide target, US patent No US 2003/0178752 A1.
7. C. G. Granqvist, A. Hultåker, Transparent and conductive ITO films new development and applications, Thin Solid Films 411 (2002) pp. 1-5.
8. 2 thin films, Thin Solid films 490 (2005) pp. 68-73.
9. J. Zhang, K. H. Au, Z. Q. Zhu, S. O'Shea, Sol-gel preparation of poly (ethylene glycol) doped indium tin oxide thin films for sensing application, Optical Materials 26 (2004) pp. 47-55.
10. M. J. Alam, D. C. Cameron, Optical and electrical properties of transparent conductive ITO thin films deposited by sol-gel process, Thin Solid Films 377-378 (2000) pp. 455-459.
11. S-J. Hong, J-I. Han, Indium tin oxide (ITO) thin film fabricated by indium-tin-organic sol including ITO nanoparticle, Current Applied Physics 6S1 (2006) pp. e206-e210.
12. C. Su, T. K. Sheu, M. A. Wang, M. C. Feng, W. C. Hung, Preparation of ITO Thin Films by Sol-Gel Process and Their Characterizations, Synthetic Metals 153 (2005) pp. 9-12.
13. A. Hultåker, K. Järrendahl, J. Lu, C-G. Granqvist, G. A. Niklasson, Electrical and optical properties of sputter deposited tin doped indium oxide thin films with silver additive, Thin Solid Films 392 (2001) pp. 305-310.
14. M. P. Pechini, Method of preparing lead and alkaline earth titanates and niobates and coating method using the same to form capacitor, US Patent No 3330697 (1967).
15. J. Ederth, A. Hultåker, G. A. Niklasson, P. Heszler, A. R. Van Doorn, M. I. Jongerius, D. Burgard, C. G. Granqvist, Thin porous indium tin oxide nanoparticle films: effect of annealing in vacuum and air, Appl. Phys. A 81 (2005) 1363-1368.
16. 2 powders aimed for gas sensor applications, Materials Science and Engineering B, 130 (2006) 200-2005.
17. 2, Ceramics International 33 (2007) 511-514.
18. S. Shionoya, W. M. Yen, Phosphors handbook, Phosphors Research Society, CRC Press, New York, 1998, 561-580.