Nucleation and growth of copper nanoparticles on silicon surfaces

Physica Scripta T

Volumn T115, Issue , 2005, Pages 714-716

  Singh, A ^a   Luening, K ^a   Brennan, S ^a   Homma, T ^a,b   Kubo, N ^a,b   Pianetta, P ^a  

^a SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

^b WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; NANOPARTICLES; NUCLEATION; SILICON; SILICON WAFERS; X RAY ABSORPTION FINE STRUCTURE SPECTROSCOPY;

COPPER INTERCONNECT TECHNOLOGY; COPPER NANOPARTICLES; METAL DEPOSITION; SILICON SURFACES;

COPPER;

EID: 42149188790     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1238/Physica.Topical.115a00714     Document Type: Article

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