Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6897, Issue , 2008, Pages

  Chang, Jee Soo ^a   Kim, Myung Ki ^a   Lee, Yong Hee ^a   Shin, Jung H ^a   Sung, Gun Yong ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Er; Micro disk; Silicon rich silicon nitride

Indexed keywords

ARCHITECTURAL DESIGN; CUBIC BORON NITRIDE; DAMPING; DISKS (MACHINE COMPONENTS); DISKS (STRUCTURAL COMPONENTS); ELECTRONICS INDUSTRY; INTEGRATED CIRCUITS; MICROELECTRONICS; NITRIDES; NONMETALS; OPTICAL PROPERTIES; REFRACTIVE INDEX; RESONATORS; SILICON; SILICON NITRIDE; THICK FILMS; THIN FILMS;

(100) SILICON; CMOS COMPATIBLE; DISK RESONATORS; ER DOPED; ER3+ LUMINESCENCE; EVANESCENT COUPLING; FDTD CALCULATIONS; HIGH REFRACTIVE INDEX; MICRO DISKS; MICRO-DISKS; OPTO ELECTRONIC INTEGRATED CIRCUITS (OEIC); Q-FACTORS; SI NANOCLUSTERS; TAPERED FIBERS; WHISPERING GALLERY MODES (WGM); WHISPERING-GALLERY-MODE (WGM);

ERBIUM;

EID: 42149187552     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.764327     Document Type: Conference Paper

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