Advances in MEMS deformable mirror technology for laser beam shaping

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6663, Issue , 2007, Pages

  Menn, Steven ^a   Cornelissen, Steven A ^a   Bierden, Paul A ^a  

^a BOSTON MICROMACHINES CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMABLE MIRRORS; HIGH ACTUATOR MIRROR ARRAYS; LASER BEAM SHAPING;

ADAPTIVE OPTICS; IMAGING TECHNIQUES; LASER BEAMS; MIRRORS; OPTICAL TELESCOPES;

MEMS;

EID: 42149154800     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.739042     Document Type: Conference Paper

References (8)

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