Influence of the laser parameters on the patterning quality of thin-film silicon modules

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6651, Issue , 2007, Pages

  Haas, S ^a   Gordijn, A ^a   Schope G ^a   Pieters, B E ^a   Stiebig, H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Flake formation; Laser patterning; Monolithically series connection; Thin film modules

Indexed keywords

LASER ABLATION; PARAMETER ESTIMATION; SOLID STATE LASERS; THIN FILMS;

FLAKE FORMATION; LASER PATTERNING; MONOLITHICALLY SERIES CONNECTION; THIN-FILM MODULES;

SILICON COMPOUNDS;

EID: 42149119758     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.733556     Document Type: Conference Paper

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