Correction of high spatial frequency errors on optical surfaces by means of ion beam figuring

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6671, Issue , 2007, Pages

  Ghigo, M ^a   Canestrari, R ^a,b   Spiga, D ^a   Novi, A ^c  

^a INAF OSSERVATORIO ASTRONOMICO DI BRERA   (Italy)

^b UNIVERSITY OF INSUBRIA   (Italy)

^c GALILEO AVIONICA   (Italy)

Author keywords

Conical concentrator; Etching rate; Focusing grids; IBF; Ion beam figuring; Removal function; Removal rate; Spatial frequencies

Indexed keywords

ASTRONOMY; ERROR CORRECTION; ION BEAMS; OPTICAL SYSTEMS; SURFACE ANALYSIS;

CONICAL CONCENTRATORS; ETCHING RATE; FOCUSING GRIDS; ION BEAM FIGURING (IBF); REMOVAL FUNCTION; REMOVAL RATE; SPATIAL FREQUENCIES;

OPTICAL MATERIALS;

EID: 42149112363     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.734273     Document Type: Conference Paper

References (3)

1. Prashant M. Shanbhag, Michael R. Feinberg, Guido Sandri, Mark N. Horenstein, and Thomas G. Bifano "Ionbeam machining of millimeter scale optics", 1 February 2000 / Vol. 39, No. 4 / APPLIED OPTICS
2. M. Ghigo, P. Conconi, E. Antonello, G. Pareschi, "Accurate ion beam figuring of field correctors for optical and UV space instrumentation", Proc. OPTRO 2005 International Symposium, (2005)
3. Axel Schindler, Thomas Hansel, Andreas Nickel, Frank Frost, Peter Seidel, Wilfried Frank, Georg Bohm, Thomas Arnold, Renate Fechner, Nasser Razek "Ion Beam and plasma jet techniques for precision figuring and polishing", OptoNetWorkshop - May 16-17, "Ultra Precision Manufacturing of Aspheres, Freeforms and Microstructures", (2006)