Nanoscale fabrication of a plasmonic dimple lens for nano-focusing of light

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6641, Issue , 2007, Pages

  Vedantam, Shantha ^a   Lee, Hyojune ^a   Tang, Japeck ^a   Conway, Josh ^a   Staffaroni, Matteo ^a   Lu, Jesse ^a   Yablonovitch, Eli ^a,b  

^a University of California   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Dimple; Nano focusing; Nanofabrication; Optical; Plasmonic; Polishing; Surface plasmon

Indexed keywords

NANO FOCUSING; NANOMETERS; NANOSCALE APPLICATIONS; OPTICAL ENERGY;

DIFFRACTION; LENSES; SURFACE PLASMON RESONANCE; THROUGHPUT;

NANOSTRUCTURED MATERIALS;

EID: 42149107955     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.735462     Document Type: Conference Paper

References (21)

1. N.F. van Hulst, J-A. Veerman, M. F. Garcia-Parajo, and L.K. Kuipers "Analysis of individual (macro)molecules and proteins using near-field optics," J. Chem. Phys. 112, p7799 (2000)
2. ITRS roadmap report " International Technology Roadmap for Semiconductors, 2006, Executive Summary," http://www.itrs.net/Links/ 2006Update/FinalToPost/00_ExecSum2006Update.pdf
3. William A. Challener, Terry W. Mcdaniel, Christophe D. Mihalcea, Keith R. Mountfield, Kalman Pelhos and Ibrahim K. Sendur, "Light Delivery Techniques for Heat-Assisted Magnetic Recording," Jpn. J. Appl. Phys. 42, p981-988 (2003)
4. Terry W. Mcdaniel, William A. Challener and Kursat Sendur, "Issues in Heat-Assisted Perpendicular Recording," IEEE Trans. on Magnetics 39, 1972-1979 (2003)
5. L. Novotny, D.W. Pohl, B. Hecht, "Scanning near-field optical probe with ultrasmall spot size," Opt. Lett., 20, 970-972 (1995)
6. A.Chimmalgi, T.Y.Choi, C.P. Grigorapoulos, K. Komvopoulos, "Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy," App. Phys. Lett. 82, 1146-1148 (2003)
7. H. Bethe, "Theory of diffraction by small holes," Phys.Rev. 66, p163 (1944)
8. C.J. Bouwkamp, Philips Res. Rep. 5, p321 (1950)
9. X. Shi and L. Hesselink, "Design of a C aperture to achieve λ/10 resolution and resonant transmission," J. Opt. Soc. Am. B 21, p1305 (2004)
10. E. Cubukcu, E. A. Kort, K. B. Crozier, and F. Capasso, " Plasmonic laser antenna," App. Phys. Lett. 89, p093120-1 (2006)
11. J.M. Steele, Z.W. Liu, Y. Wang, and X. Zhang, "Resonant and non-resonant generation and focusing of surface plasmons with circular gratings," Opt. Exp. 14, 5664-5670 (2006)
12. J. A. Conway, "Efficient Optical Coupling to the Nanoscale," Ph.D. thesis, University of California, Los Angeles (2006)
13. H.T. Miyazaki and Y. Kurokawa, "Squeezing visible light waves into a 3-nm-thick and 55-nm-long plasmon cavity," Phys. Rev. Lett. 96, 097401 (2006)
14. J. Lu, C. Petre, J. Conway, and E. Yablonovitch, "Numerical Optimization of a Grating Coupler for the Efficient Excitation of Surface Plasmons at an Ag-SiO2 Interface," J. Opt. Soc. Am. B 24, p 2268 (2007)
15. D.A. Muller, T. Sorsch, S. Moccio, F.H. Baumann, K. Evans-Lutterodt, and G. Timp, "The electronic structure at the atomic scale of ultrathin gate oxides," Nature 399, 758 (1999)
16. X. Shi, M. Shriver, Z. Zhang, T. Higman, and S.A. Campbell, "Properties of high-k/ultrahigh purity silicon nitride stacks," J. Vac. Sci. Technol. A 22, 1146 (2004)
17. K.R. Williams, K. Gupta, and M. Wasilik, "Etch Rates for Micromachining Processing -Part II," J. Microelectromech. Syst. 12, p761 (2003)
18. M. Madou, Fundamentals of Microfabrication, Chapter 4, CRC Press, New York, 1997
19. R. Petrovic, S. Strbac, N. Bundaleski, and Z. Rakocevic, "Surface roughness minimum: Ag thin layer deposited on glass," J. Serb. Chem. Soc. 66, 483 (2001)
20. A. Bendavid, P. J. Martin, L. Wieczorek, "Morphology and optical properties of gold thin films prepared by filtered arc deposition," Thin Solid Films 354, 169 (1999)
21. T.J. Yang, G.A. Lessard, and S.R. Quake, "An apertureless near-field microscope for fluorescence imaging," App. Phys. Lett. 76, 378 (2000)