Simulation on signal processing of focusing and leveling measurement system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6724, Issue , 2007, Pages

  Li, Xiaoping ^a   Chen, Feibiao ^b   Li, Zhidan ^b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b Shanghai Micro Electronics Equipment Co Ltd   (China)

Author keywords

Focusing and leveling; Photolithography; Signal processing; Simulation

Indexed keywords

COMPUTER SIMULATION; FOCUSING; PHOTOLITHOGRAPHY; POSITION MEASUREMENT; PROJECTION SYSTEMS; SIGNAL PROCESSING;

HIGH RESOLUTION LITHOGRAPHY; LEVELING MEASUREMENT SYSTEM;

OPTICAL INSTRUMENT LENSES;

EID: 42149104687     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.782958     Document Type: Conference Paper

References (7)

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