Shear of thin polytetrafluoroethylene films on Si substrate determined by laser interferometer

Materials Science and Engineering: A

Volumn 483-484, Issue 1-2 C, 2008, Pages 701-704

  Liu, Yonghe ^a   Ahmed, S I U ^a   Schaefer, Juergen A ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Contact area; Fluorocarbon; Shear force; Thin films

Indexed keywords

FILM THICKNESS; FLUOROCARBONS; LASER INTERFEROMETRY; POLYTETRAFLUOROETHYLENES; SHEAR STRESS; SILICON;

CONTACT AREA; HERTZ CONTACT MODEL;

POLYMER FILMS;

FILM THICKNESS; FLUOROCARBONS; LASER INTERFEROMETRY; POLYMER FILMS; POLYTETRAFLUOROETHYLENES; SHEAR STRESS; SILICON;

EID: 41849136907     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2006.12.173     Document Type: Article

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