A microminiature electric-to-fluidic valve

Micromechanics and MEMS: Classic and Seminal Papers to 1990

Volumn , Issue , 1997, Pages 437-439

  Zdeblick, Mark J ^a   Angell, James B ^a  

^a Stanford University   (United States)

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EID: 41849112091     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1109/9780470545263.sect8     Document Type: Chapter

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