Evaluation of handling stresses applied to EFG silicon wafer using a bernoulli gripper

Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4

Volumn 2, Issue , 2006, Pages 1346-1349

  Brun, Xavier F ^a   Melkote, Shreyes N ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PHOTOVOLTAIC CELLS; POLYCRYSTALLINE MATERIALS;

BERNOULLI GRIPPERS; WAFER DEFORMATION;

SILICON WAFERS;

EID: 41749110889     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WCPEC.2006.279680     Document Type: Conference Paper

References (8)

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7. T.P. Ma, "Stresses in SiO2-on Si Strucutres', Properties of Silicon", EMIS Datareviews Series, 1988, 4, pp 650-661, INSPEC.
8. rd World Conference on Photovoltaic Energy Conversion, 2003, pp. 1308-1311.