Implementation of highly stable microcrystalline silicon by VHF PECVD at high deposition rate in micromorph tandem cells

Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4

Volumn 2, Issue , 2006, Pages 1473-1476

  Rath, Jatindra K ^a   Verkerk, Arjan ^a   Franken, Ronald ^a   Van Bommel, Caspar ^a   Van Der Werf, Karine ^a   Gordijn, Aad ^a   Schropp, Ruud ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

GROWTH KINETICS; OPTICAL EMISSION SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLAR CELLS;

DEVICE QUALITY; MICROMORPH TANDEM CELLS;

MICROCRYSTALLINE SILICON;

EID: 41749085246     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WCPEC.2006.279747     Document Type: Conference Paper

References (7)

1. J. K. Rath, Solar Energy Materials and Solar Cells, 76, (2003), 431.
2. A. Gordijn, J. Löffler, W.M. Amoldbik, F.D. Tichelaar, Solar Energy Materials and Solar Cells, 87 (2005) 445.
3. A. Gordijn, J.K. Rath and R.E.I. Schropp, High-Efficiency μc-Si Solar Cells made by Very High-Frequency Plasma Enhanced Chemical Vapor Deposition, to be published in Progress in Photovoltaics.
4. A. Gordijn, J. Francke, L. Hodakova, J.K. Rath,., R.E.I. Schropp, Materials Research Society Symposium Proceedings, 862 (2005), pp. 87-92.
5. J. K. Rath, R. H. J. Franken, A. Gordijn, R. E. I. Schropp and W. J. Goedheer, J. Non-Cryst. Solids, 338-340, (2004) 56.
6. A. Gordijn, L. Hodakova, J.K. Rath and R.E.I. Schropp, J. Non-Cryst. Solids (2006) (in print).
7. Ronald Franken, Hongbo Li, Robert Stolk, Karine van der Werf, Jatindra Rath, Ruud Schropp, this volume.