Synthesis and characterization of smooth ultrananocrystalline diamond films via low pressure bias-enhanced nucleation and growth

Applied Physics Letters

Volumn 92, Issue 13, 2008, Pages

  Chen, Y C ^a,b   Zhong, X Y ^b   Konicek, A R ^c   Grierson, D S ^c   Tai, N H ^a   Lin, I N ^d   Kabius, B ^b   Hiller, J M ^b   Sumant, A V ^b   Carpick, R W ^e   Auciello, O ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c University of Wisconsin Madison   (United States)

^d TAMKANG UNIVERSITY   (Taiwan)

^e UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; NANOCRYSTALLINE MATERIALS; NUCLEATION; PRESSURE EFFECTS; SYNTHESIS (CHEMICAL);

BIAS-ENHANCED NUCLEATION (BEN); ULTRANANOCRYSTALLINE DIAMOND (UNCD) FILMS;

DIAMOND FILMS;

EID: 41649114347     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2838303     Document Type: Article

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