Precise selective deposition of microparticles on electrodes of microelectronic chips

Review of Scientific Instruments

Volumn 79, Issue 3, 2008, Pages

  Nesterov, Alexander ^a,b   König, Kai ^a,b   Felgenhauer, Thomas ^a   Lindenstruth, Volker ^b   Trunk, Ulrich ^b   Fernandez, Simon ^a   Hausmann, Michael ^b   Ralf Bischoff, F ^a   Breitling, Frank ^a   Stadler, Volker ^a  

^a GERMAN CANCER RESEARCH CENTER DKFZ   (Germany)

^b UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; DESORPTION; ELECTROCHEMICAL ELECTRODES; ELECTROPHORESIS; MICROELECTRONICS; MICROPROCESSOR CHIPS; VOLTAGE CONTROL;

DIELECTROPHORETIC ATTRACTING; MICROELECTRONIC CHIPS; MICROPARTICLES; TANGENTIAL DETACHING;

PARTICLES (PARTICULATE MATTER);

POLYMER;

ARTICLE; ELECTRICITY; METHODOLOGY; MICROCHIP ANALYSIS; MICROELECTRODE; PARTICLE SIZE; SEMICONDUCTOR; SURFACE PROPERTY;

ELECTRICITY; MICROCHIP ANALYTICAL PROCEDURES; MICROELECTRODES; PARTICLE SIZE; POLYMERS; SEMICONDUCTORS; SURFACE PROPERTIES;

EID: 41549167269     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2900012     Document Type: Article

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