Simplified RF-MEMS switches using implanted conductors and thermal oxide

Proceedings of the 1st European Microwave Integrated Circuits Conference, EuMIC 2006

Volumn , Issue , 2006, Pages 509-512

  Siegel, Christian ^a   Ziegler, Volker ^a   Schönlinner, Bernhard ^a   Prechtel, Ulrich ^a   Schumacher, Hermann ^b  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b UNIVERSITY OF ULM   (Germany)

Author keywords

Alloy; Aluminum; Bended beams; Implantation; Microwave; RF MEMS; Switch; Thermal oxide

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC CONDUCTORS; ELECTRIC NETWORK TOPOLOGY; INSERTION LOSSES; MEMS; MICROWAVE DEVICES;

BENDED BEAMS; CAPACITIVE COUPLING; SILICON SUBSTRATE; THERMAL OXIDE;

ELECTRIC SWITCHES;

EID: 41549162452     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EMICC.2006.282695     Document Type: Conference Paper

References (8)

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