Spring constant models for analysis and design of MEMS plates on straight or meander tethers

Sensor Letters

Volumn 4, Issue 2, 2006, Pages 200-205

  Lishchynska, Maryna ^a   Cordero, Nicolas ^a   Slattery, Orla ^a   O'Mahony, Conor ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Elastically suspended plate; MEMS; Pull in voltage; RF switch; Spring constant

Indexed keywords

GEOMETRY; STIFFNESS; SWITCHES; TETHERLINES;

CONVENTIONAL MODELS; ELASTICALLY SUSPENDED PLATES; SPRING CONSTANTS;

MEMS;

EID: 41549154806     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2006.011     Document Type: Article

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