Determination of the electron density in plasma by means of a floating double probe

Review of Scientific Instruments

Volumn 79, Issue 3, 2008, Pages

  Jauberteau, J L ^a   Jauberteau, I ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; GAS MIXTURES; PROBES;

FLOATING DOUBLE PROBE; PLASMA POTENTIAL; PROBE MEASUREMENTS;

PLASMAS;

EID: 41549136966     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2900579     Document Type: Article

References (20)

1. J. A. Thornton, J. Vac. Sci. Technol. 15, 188 (1978).
2. R. M. Clements, J. Vac. Sci. Technol. 15, 193 (1978).
3. I. Jauberteau, J. L. Jauberteau, M. Cahoreau, and J. Aubreton, Trends in Vacuum Science and Technology 4, 77 (2001).
4. E. A. Brinkman, K. R. Stalder, and J. B. Jeffries, J. Appl. Phys. 81, 1093 (1997).
5. H. M. Mott-Smith and I. Langmuir, Phys. Rev. 28, 727 (1926).
6. E. O. Johnson and L. Malter, Phys. Rev. 80, 58 (1950).
7. K. Yamamoto and T. Okuda, J. Phys. Soc. Jpn. 11, 57 (1956).
8. J. S. Chang and J. G. Laframboise, J. Phys. D 9, 1699 (1976).
9. I. D. Sudit and R. C. Woods, J. Appl. Phys. 76, 4488 (1994).
10. J. L. Jauberteau and I. Jauberteau, Plasma Sources Sci. Technol. 17, 015119 (2008).
11. J. W. Swift and M. J. R. Schwar, Electrical Probes for Plasma Diagnostics (Ilife Books, London, 1970).
12. F. F. Chen, Electric Probe in Plasma Diagnostic Techniques, edited by, R. H. Huddlestone, and, S. L. Leonard, (Academic, New York, 1965), pp. 113-200.
13. W. M. Kaplan and V. J. Perel, Sov. Phys. Usp. 6, 767 (1964).
14. D. Lee and N. Hershkowitz, Phys. Plasmas 14, 033507 (2007).
15. V. Pletnev and J. G. Laframboise, Phys. Plasmas 13, 073503 (2006).
16. S. C. Brown, Introduction to Electrical Discharges in Gases (Wiley, New York, 1966), pp. 87-97.
17. J. G. Laframboise and L. N. Parker, Phys. Fluids 16, 619 (1973).
18. C. D. Child, Phys. Rev. 32, 492 (1911).
19. R. Warren, Phys. Rev. 98, 1658 (1955).
20. F. F. Chen, J. D. Evans, and D. Arnush, Phys. Plasmas 9, 1449 (2002).