Silicon nanowires: Growth studies using pulsed PECVD

Materials Research Society Symposium Proceedings

Volumn 989, Issue , 2007, Pages 537-542

  Parlevliet, David ^a   Cornish, John C L ^a  

^a MURDOCH UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; GROWTH RATE; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON;

PULSED PECVD; SILICON NANOWIRES; SUBSTRATE TEMPERATURES; VAPOR LIQUID SOLID (VLS) MECHANISM;

NANOWIRES;

EID: 41549118116     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0989-a23-03     Document Type: Conference Paper

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