Deposition mechanism for chemical vapor deposition of zirconium carbide coatings

Journal of the American Ceramic Society

Volumn 91, Issue 4, 2008, Pages 1249-1252

  Wang, Yiguang ^a,b   Liu, Qiaomu ^a   Liu, Jinling ^a   Zhang, Litong ^a   Cheng, Laifei ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

^b AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CARBON; CHEMICAL VAPOR DEPOSITION; COATINGS; THERMODYNAMICS;

FILM COMPOSITIONS; ZIRCONIUM CARBIDE;

ZIRCONIUM COMPOUNDS;

EID: 41549106245     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2007.02253.x     Document Type: Article

References (25)

1. K. Upadhya, J. M. Yang W. P. Hoffmann Materials for Ultrahigh Temperature Structural Applications Am. Ceram. Soc. Bull., 76 [12] 51 6 (1997).
2. 2-ZrC-SiC Composites Fabricated by Spark Plasma Sintering and Hot-Pressing Adv. Eng. Mater., 7 [3] 159 63 (2005).
3. W. A. Mackie P. R. Davis Single-Crystal Zirconium Carbide as a High-Temperature Thermionic Cathode Material IEEE Trans. Electron Devices, 36, 220 4 (1989).
4. K. IKAWA Vapor Deposition of Zirconium Carbide-Carbon Composites by the Iodide Process J. Less-Common Met., 27, 325 32 (1972).
5. T. Ogawa, K. Ikawa K. Iwamoto Chemical Vapor Deposition of ZrC within a Spouted Bed by Bromide Process J. Nucl. Mater., 97, 104 12 (1981).
6. T. Ogawa, K. Ikawa K. Iwamoto Effect of Gas Composition on the Deposition of ZrC-C Mixtures: The Bromide Process J. Mater. Sci., 14, 125 32 (1979).
7. R. J. Imprescia, L. S. Levinson, R. D. Reiswig, T. C. Wallace J. M. Williams Carbide Coated Fibers on Graphite-Aluminum Composites Progress Report No. 1: Los Alamos Scientific Laboratory, September 1, 1973-January 31, 1974.
8. 6 Nucl. Technol., 35, 527 35 (1977).
9. V. G. Samoilenko L. N. Pereselentseva Deposition of Zirconium Carbide Coating Acting as Diffusion Barriers in Composites Consisting of a Metallic Matrix and Refractory Metal Fibres Powder Metall. Met. Ceram., 14, 725 8 (1975).
10. G. H. Reynolds Chemical Vapor Deposition of ZrC on Pyrocarbon-Coated Fuel Particles J. Nucl. Mater., 50, 215 6 (1974).
11. V. F. Funke, A. I. Tyutyunnikov, V. S. Makeev, A. N. Pilyugin V. A. Shevchenko Deposition of Niobium and Zirconium Carbides with Vapor-Gas Phase Circulation in a Closed Circuit Powder Metall. Met. Ceram., 15, 452 5 (1976).
12. P. Wagner, L. A. Wahman, R. W. White, C. M. Hollabaugh R. D. Reiswig Factors Influencing the Chemical Vapor Deposition of ZrC J. Nucl. Mater, 62, 221 8 (1976).
13. 2 Gaseous Mixture J. Electrochem. Soc., 132, 704 6 (1985).
14. G. L. Vignoles, F. Langlais, C. Descamps, A. Mouchon, H. Poche, N. Reuge N. Bertrand CVD and CVI of Pyrocarbon from Various Precursors Surf. Coat. Technol., 188, 241 9 (2004).
15. Z. J. Hu, G. Schoch K. J. Hüttinger Chemistry and Kinetics of Chemical Vapor Infiltration of Pyrocarbon VII: Infiltration of Capillaries of Equal Size Carbon, 38, 1059 65 (2000).
16. 2 Precursors J. Electrochem. Soc., 153 [12] C795 800 (2006).
17. Y. Lee, D. Choi, J. Park G. Hong The Effect of Diluent Gases on the Growth Behavior of CVD SiC Films with Temperature J. Mater. Sci., 35, 4519 26 (2000).
18. C. Zhao Q. Lu The Carbon Deposition Process Studied by CVI Dynamic Analysis System Unpublished.
19. M. Brüggert, Z. Hu K. J. Hüttinger Chemistry and Kinetics of Chemical Vapor Deposition of Pyrocarbon VI: Influence of Temperature Using Methane as a Carbon Source Carbon, 37, 2021 30 (1999).
20. H. B. Palmer T. J. Hirt The Activation Energy for the Pyrolysis of Methane J. Phys. Chem., 67, 709 11 (1963).
21. E. F. Arefèva, I. S. Rafalkes P. A. Tesner Kinetics of Pyrocarbon Formation from Methane and Acetylene at Temperatures Above 1000°C Khim. Tverd. Topl., 5, 113 6 (1977).
22. W. Benzinger, A. Becker K. J. Hüttinger Chemistry and Kinetics of Chemical Vapour Deposition of Pyrocarbon: I. Fundamentals of Kinetics and Chemical Reaction Engineering Carbon, 3, 3957 66 (1996).
23. y and TiC on Cemented Tungsten Carbide J. Mater. Sci., 17, 2495 502 (1982).
24. H. O. Pierson M. L. Lieberman The Chemical Vapor Deposition of Carbon on Carbon Fibers Carbon, 13, 159 66 (1975).
25. Q. M. Liu, L. T. Zhang, L. F. Cheng Y. G. Wang Morphologies and Growth Mechanisms of Zirconium Carbide Films by Chemical Vapor Deposition Mater. Lett. (submitted).