![]() |
Volumn 516, Issue 13, 2008, Pages 4374-4378
|
Formation of gas atom encapsulated silicon clusters using electron beam generated silicon plasmas
|
Author keywords
Electron beam gun; Gas atom encapsulation; Silicon clusters; Silicon plasma
|
Indexed keywords
ELECTRON BEAMS;
FILM PREPARATION;
PLASMA GUNS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ELECTRON BEAM GUNS;
GAS ATOM ENCAPSULATION;
GAS PLASMA;
SILICON CLUSTERS;
SILICON PLASMA;
X-RAY PHOTOEMISSION SPECTROSCOPES;
SILICON COMPOUNDS;
|
EID: 41549100502
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2007.10.061 Document Type: Article |
Times cited : (1)
|
References (18)
|