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Volumn 516, Issue 13, 2008, Pages 4374-4378

Formation of gas atom encapsulated silicon clusters using electron beam generated silicon plasmas

Author keywords

Electron beam gun; Gas atom encapsulation; Silicon clusters; Silicon plasma

Indexed keywords

ELECTRON BEAMS; FILM PREPARATION; PLASMA GUNS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 41549100502     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.061     Document Type: Article
Times cited : (1)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.