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Volumn 248-249, Issue , 1997, Pages 405-408
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Ion beam analysis and applications in on-line monitoring of ion induced modifications of materials
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Author keywords
Detector Telescope; Electronic Energy Loss; ERDA; RBS; Sputtering
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Indexed keywords
CHEMICAL MODIFICATION;
ELECTRON ENERGY LOSS SPECTROSCOPY;
INTERFACES (MATERIALS);
ION BEAMS;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SPUTTERING;
SURFACE PROPERTIES;
ELASTIC RECOIL DETECTION ANALYSIS (ERDA);
ION BEAM ANALYSIS;
MATERIALS SCIENCE;
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EID: 4143109062
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.248-249.405 Document Type: Article |
Times cited : (2)
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References (15)
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