Water based I-line projection lithography of PEDOT

Synthetic Metals

Volumn 135-136, Issue , 2003, Pages 53-54

  Touwslager, F J ^a   Willard, N P ^a   De Leeuw, D M ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Conductivity; Polythiophene and derivatives; Scanning tunneling microscopy; Solution processing

Indexed keywords

DERIVATIVES; INORGANIC ACIDS; INTEGRATED CIRCUITS; MICROELECTRONICS; PHOTOSENSITIVITY; SCANNING TUNNELING MICROSCOPY; SOLUTIONS; ULTRAVIOLET RADIATION;

CONDUCTIVITY; DIAZONIUM SALTS; POLYMERIC MICROELECTRONIC DEVICES; POLYTHIOPHENE AND DERIVATIVES;

LITHOGRAPHY;

EID: 4143088999     PISSN: 03796779     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0379-6779(02)00656-2     Document Type: Conference Paper

References (11)

1. C.J. Drury, C.M.J. Mutsaers, M. Matters and D.M. de Leeuw, Appl. Phys. Lett. 73 (1998) 108.
2. F.J. Touwslager, N.P. Willard, D.M. de Leeuw submitted to Appl. Phys. Lett.
3. D.M. de Leeuw, G.H. Gelinck, F.J. Touwslager, N.P. Willard WO 01/20691 A1 (2001);
4. F.J. Touwslager, EP02075473.5 (2002).
5. Baytron P, Bayer AG, Leverkusen, Germany, and experimental latices from AGFA, Mortsel, Belgium.
6. F. Jonas European Patent No. EP 686 662 A2.
7. A.N. Aleshin, S.R. Williams, A.J. Heeger, Synth. Met. 94 (1998) 173.
8. Courtesy of Prof. H. van Kempen, Research Institute for Materials, University of Nijmegen, The Netherlands.
9. J. Brandrup et al (eds.), Polymer Handbook 4th ed. John Wiley, New York, 1999, p. VII 507.
10. Spraying Systems Co. Wheaton, Illinois, U.S.A.
11. G.H. Gelinck, T.C.T. Geuns and D.M. de Leeuw, Appl. Phys. Lett. 77, 1487 (2000).