In-situ frequency trimming of SAW resonator using conventional crystal resonator fine tuning method with gold thin film addition

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 1730-1733

  Wang, S M ^a   Wang, Y J ^a   Lo, Chung Lun ^a   Chao, M C ^a   Liu, C W ^a   Lin, C W ^a   Wang, C L ^a   Lam, C S ^a  

^a TXC CORPORATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; CRYSTAL RESONATORS; DIELECTRIC MATERIALS; ELECTRIC CONDUCTIVITY; GOLD; QUARTZ; REACTIVE ION ETCHING; THIN FILMS; TRIMMING; TUNING;

FINE TUNING METHODS; GOLD THIN FILMS; IN-SITU FREQUENCY TRIMMING; SAW RESONATORS;

SURFACE WAVES;

EID: 4143087458     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Fine Tuning of Narrow-Band SAW Devices Using Dielectric Overlays, C.N. Helmick et al., Proc. 1977 Ultrasonics Symposium, pp. 659-663.
2. 2 Film Overlays, T.E. Parker and H. Wichansky, J. Appl. Phys. 50 (3), pp. 1360-1369.
3. High Frequency SAW Filter on Diamond, K. Higaki et al., 1997 MTT-S Digest, pp. 829-832.
4. Thin-Films for SAW Devices, F.S. Hickernell, Advances in Surface Acoustic Wave Technology, Systems and Applications (Vol. 1), Ed. Clemens C.W. Ruppel and Tor A. Fjeldly, 2000, World Scientific.
5. Dispersive Rayleigh Waves in Quartz, G. Cambon and C.F. Quate, Electron. Lett., 5 (1969), pp. 402-403.
6. Attenuation of Dispersive Rayleigh Waves on Quartz, G. Cambon and Rouzeyre, Electron. Lett., 6 (1970), pp. 539-540.