Fabrication and modeling of inversion layer ultrasonic transducers using LiNbO3 single crystal

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 1034-1037

  Zhou, Q F ^a,b   Cannata, J ^a,b   Huang, C Z ^b   Guo, H K ^a,b   Marmarelis, V ^a,b   Shung, K Kirk ^a,b  

^a University of Southern California ^*  (United States)

^b UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BANDWIDTH; FERROELECTRIC MATERIALS; PIEZOELECTRIC DEVICES; PLATES (STRUCTURAL COMPONENTS); SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; SPUTTERING; THICKNESS MEASUREMENT; THIN FILMS; TRANSDUCERS;

ELECTROMECHANICAL COUPLING; ELEMENT THICKNESS; MECHANICAL BONDING; PARYLENE;

ULTRASONIC DEVICES;

EID: 4143082772     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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