Ion beam analysis with monolayer depth resolution

Materials Science Forum

Volumn 248-249, Issue , 1997, Pages 459-466

  Carstanjen, H D ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

Electrostatic Spectrometer; ERD of Hydrogen; ERD of Oxygen; High Depth Resolution; High Resolution ERD; High Resolution RBS; Ion Beam Analysis; Oxidation; Polymer Multilayer; X Ray Mirror

Indexed keywords

ION BEAMS; MIRRORS; MULTILAYERS; OXIDATION; POLYMERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS; SPECTROMETERS; X RAYS;

ELECTROSTATIC SPECTROMETERS; HIGHLY ELASTIC RECOIL DETECTION ANALYSIS (HERDA);

SURFACE STRUCTURE;

EID: 4143081457     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.248-249.459     Document Type: Article

References (13)

1. R.G. Smeenk, R.M. Tromp, H.H. Kersten, A.J.H. Boerboom, and F.W. Saris, Nucl. Instr. Methods 195, 581 (1982)
2. Th. Enders, M. Rilli, and H.D. Carstanjen, Nucl. Instr. Methods B 64, 817 (1992)
3. H.D. Carstanjen, W. Decker, and H. Stoll, Z. Metallkunde 84, 368 (1993)
4. O. Kruse and H.D. Carstanjen, Nucl. Instr. Methods B 89, 191 (1994)
5. R. Plieninger and H.D. Carstanjen, Nucl. Instr. Methods B, in press
6. Th. Fischer, Diplom-Thesis Univ. Stuttgart 1996
7. O. Kruse, Dissertation, Univ. Stuttgart 1995; O. Kruse and H.D. Carstanjen, to be published
8. O. Kruse, Dissertation, Univ. Stuttgart 1995; O. Kruse and H.D. Carstanjen, to be published
9. M. Zinke-Allmang, S. Kalbitzer, and M. Weiser, Z. Physik A 320, 697 (1985)
10. M. Zinke-Allmang and O. Kruse, Nucl. Instr. Methods B 90, 579 (1994)
11. K.-H. Gießler, F. Rauch, and M. Stamm, Europhysics Letters 27, 605 (1994)
12. S. Jamecsny, D. Plachke, and H.D. Carstanjen, subm. to Phys. Rev. Letters
13. A.W.D. van der Gon, R.J. Smith, J.M. Gay, D.J. O'Connor, J.F. van der Veen, Surface Science 227, 143 (1990)