Development of water immerse type ultrasound probe with PZT film deposited by hydrothermal method

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 1300-1305

  Katsura, Naoki ^a   Ishikawa, Mutsuo ^a,b   Sato, Toshio ^a   Takeuchi, Masaaki ^a   Kawashima, Norimichi ^a   Kurosawa, Minoru ^b   Takeuchi, Shinichi ^a  

^a TOIN UNIVERSITY OF YOKOHAMA   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; DATA RECORDING; DEPOSITION; HYDROTHERMAL SYNTHESIS; MEDICAL APPLICATIONS; PIEZOELECTRIC TRANSDUCERS; RESONANCE; SENSORS; SOL-GELS; ULTRASONIC DEVICES;

ACOUSTIC IMPEDANCES; HYDROTHERMAL APPARATUS; PIEZOELECTRIC FILMS; ULTRASOUND SENSORS;

ULTRASONICS;

EID: 4143070667     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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8. M. Ishikawa, N. Katsura, T. Sato, K. Tsuji, N. Kawashima, S. Takeuchi and M. Kurosawa ; "Manufacturing of PZT thin film by hydrothermal method -Relationship between deposited condition and crystal growth, vibrating velocity-", 23rd Anniv. Symp. Ultrasonic Electonics, pp.19-20, (2002.11)