Plasma immersion ion implantation of nitrogen into porous silicon layers

Materials Science Forum

Volumn 248-249, Issue , 1997, Pages 233-236

  Manuaba, A ^a   Pinter I ^a   Szilagyi E ^a   Battistig, G ^a   Ortega, C ^b   Grosman, A ^b   Amsel, G ^b  

^a WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

^b UNIVERSITÉ PARIS DESCARTES   (France)

Author keywords

Ion Beam Analysis; Ion Implantation; Plasma Immersion; Porous Silicon

Indexed keywords

CRYSTAL IMPURITIES; ION BEAMS; ION IMPLANTATION; NITROGEN; PLASMAS; PRESSURE EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS; SUBSTRATES;

NITROGEN PLASMA IMMERSION ION IMPLANTATION (PIII);

POROUS SILICON;

EID: 4143064764     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.248-249.233     Document Type: Article

References (13)

1. G. Battistig, V. Schiller, E. Szilágyi and É. Vázsonyi, Nucl. Instr. and Meth. B 118, 654 (1996).
2. G. Amsel, E. d'Artemare, G. Battistig, V. Morazzani and C. Ortega, in print in Nucl. Instr. and Meth. B.
3. G. Bomchil, R. Herino, K. Barla and U.C. Pfister, J. Electrochem. Soc. 130, 1611 (1983).
4. A. Halimaoui, Porous Silicon Science and Technology, eds.: J.-C. Vial and J. Derrien, Springer-Verlag, Berlin, 33, (1995).
5. R. Herino, Porous Silicon Science and Technology, eds.: J.-C. Vial and J. Derrien, Springer-Verlag, Berlin, 54, (1995).
6. W. Lang, P. Steiner and F. Kozlowski, Porous Silicon Science and Technology, eds.: J.-C. Vial and J. Derrien, Springer-Verlag, Berlin, 293, (1995).
7. V. Morazzani, M. Chamarro, A Grosman, C. Ortega, S. Rigo, J. Siejka and H.J. von Bardeleben, Journal of Luminescence 57, 45 (1993).
8. Porous Silicon Science and Technology, eds.: J.-C. Vial and J. Derrien, Springer-Verlag, Berlin, (1995).
9. I. Pintér, M. Ádám, Cs. Dücsó, N.Q. Khanh and I. Bársony (CIP '95, 10th International Colloquium on Plasma Process, Antibes, France, 1995) Supplement a la Revue Le Vide, No 275, 410, (1995).
10. G. Amsel, J.P. Nadai, C. Ortega, J. Siejka, Nucl. Instr. and Meth. 149, 705 (1978).
11. Ion Beam Handbook for Material Analysis, eds.: J.M. Mayer and E. Rimini, Academic Press, New York 1977.
12. A. Grosman, Thesis, University of Paris 7, 1995
13. F. Pászti, A. Manuaba, E. Szilágyi, É. Vázsonyi and Z. Vértesy, Nucl. Instr. and Meth. B 117, 253 (1996)