Fabrication and transport study of finite lateral superlattices

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2821-2824

  Hannan, M ^a   Grundbacher, R ^a   Fay, P ^a   Adesida, I ^a   Giannetta, R W ^a   Wagner, C J ^a   Melloch, M R ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4143059286     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589735     Document Type: Article

References (10)

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