High performance inductors on CMOS-grade trenched silicon substrate

IEEE Transactions on Components and Packaging Technologies

Volumn 31, Issue 1, 2008, Pages 126-134

  Rais Zadeh, Mina ^a   Laskar, Joy ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

CMOS compatible; High Q inductors; Low loss substrate; Micromachining

Indexed keywords

ASPECT RATIO; ELECTRIC INDUCTORS; ELECTRONICS PACKAGING; MICROMACHINING; SEMICONDUCTING SILICON; SUBSTRATES;

HIGH PERFORMANCE INDUCTORS; LOW-LOSS SUBSTRATE; SILICON SUBSTRATE;

CMOS INTEGRATED CIRCUITS;

EID: 41349101779     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2008.916808     Document Type: Article

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