Self-assembled inorganic micro-display on plastic

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 755-758

  Saeedi, Ehsan ^b   Kim, Samuel S ^b   Parviz, Babak A ^a,b  

^a IEEE

^b UNIVERSITY OF WASHINGTON   (United States)

Author keywords

Flexible display; Process integration; Self assembly

Indexed keywords

ALUMINUM ALLOYS; ALUMINUM GALLIUM ARSENIDE; BINDING SITES; ETHYLENE; ETHYLENE GLYCOL; FLEXIBLE DISPLAYS; GALLIUM ALLOYS; GALLIUM COMPOUNDS; LIGHT EMITTING DIODES; MEMS; SELF ASSEMBLY; SEMICONDUCTOR ALLOYS;

CRYSTALLINE SEMICONDUCTORS; ETHYLENE GLYCOL SOLUTIONS; FLUIDIC SELF-ASSEMBLY; LOW MELTING POINT ALLOY; METAL INTERCONNECTS; MICROFABRICATION PROCESS; PROCESS INTEGRATION; SELF-ASSEMBLY METHOD;

SUBSTRATES;

EID: 41149177858     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433172     Document Type: Conference Paper

References (5)

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5. Wu; X., Coldren; L., Merz; J., "Selectrive etching characteristics of HF for AlxGal-xAs," Electronics Letters, vol. 21, n 13, pp 558-559, June 1985.