Application of electronic devices for aerosol deposition methods

NEC Technical Journal

Volumn 2, Issue 1, 2007, Pages 76-80

  Nakada, Masafumi ^a   Kawakami, Toshihiro ^b   Iwanami, Mizuki ^a   Ohashi, Keishi ^a  

^a NEC CORPORATION   (Japan)

^b NEC TOKIN CORPORATION   (Japan)

Author keywords

Aerosol deposition; Electric field sensor; Fiber sensor; Film forming technology; Optical modulator; Piezoelectric device

Indexed keywords

AEROSOL DEPOSITION; ELECTRIC FIELD SENSOR; FILM FORMING TECHNOLOGY;

DEPOSITION; FILMS; LIGHT MODULATORS; OPTICAL SENSORS; OXIDE FILMS; PIEZOELECTRIC DEVICES; SOLIDIFICATION; SUBSTRATES;

NANOCRYSTALLINE MATERIALS;

EID: 41149101900     PISSN: 18805884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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2. 3 thick films prepared for microactuators by aerosol deposition," App. Phys. Lett. 77 (2000) 1710.
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4. Ohashi, K. et al.; "Optical Interconnect Technologies for High-speed VLSI Chips Using Silicon Nano-photonics," International Solid-state Circuits Conference, Solicited Paper, #23.5, Feb. 5-9, 2006.
5. 3 films prepared by aerosol deposition method," J. Cryst. Growth, Vol. 275, e1275, 2005.
6. 3 (X. 0. 0.3, 0.6) Films Prepared by Aerosol Deposition," Jpn. J. Appl. Phys. 44(2005)L1088.
7. Nakada, M. et al.; "Fabry-Perot optical modulator fabricate by aerosol deposition," Proc. of SPIE Vol. 6050 605004-1.
8. Iwanami, M. et al.; "Microscopic Fiber-Edge Electro-Optic Probe Fabricated by Aerosol Deposition Method," IEICE 2006 Spring meeting, C-14-4.