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Volumn 244, Issue 9, 2008, Pages 2277-2309

On the partial differential equations of electrostatic MEMS devices III: Refined touchdown behavior

Author keywords

MEMS; Pull in voltage; Quenching profiles; Self similar

Indexed keywords


EID: 41149100424     PISSN: 00220396     EISSN: 10902732     Source Type: Journal    
DOI: 10.1016/j.jde.2008.02.005     Document Type: Article
Times cited : (55)

References (18)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.