Study and applications of plasma-modified Si and porous Si surfaces

Applied Surface Science

Volumn 254, Issue 12, 2008, Pages 3648-3652

  Gabouze, N ^a   Benzekkour, N ^a   Mahmoudi, Be ^a   Belhousse, S ^a   Cheraga, H ^a   Ghellai, N ^b  

^a L'Unite de Developpement de la Technologie du Silicium   (Algeria)

^b UNIVERSITY OF TLEMCEN   (Algeria)

Author keywords

Gas sensors; MIS structures; Porous materials; Silicon

Indexed keywords

ELECTROLYTES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROCARBONS; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY;

HF ELECTROLYTES; POROUS SI SURFACES;

POROUS SILICON;

EID: 40849136044     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.10.074     Document Type: Article

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