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Volumn 75, Issue 10, 2008, Pages 3121-3130

Elastic anisotropy effect on indentation-induced thin film interfacial delamination

Author keywords

Adhesion; Anisotropic elasticity; Boundary element method; Cohesive zone model; Delamination; Expanding cavity model; Fracture mechanics; Indentation; Thin films

Indexed keywords

ANISOTROPY; BOUNDARY ELEMENT METHOD; COPPER; CRACK INITIATION; ELASTICITY; GREEN'S FUNCTION; INDENTATION; METALLIC FILMS; STRESS ANALYSIS;

EID: 40849113022     PISSN: 00137944     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.engfracmech.2007.12.008     Document Type: Article
Times cited : (9)

References (30)
  • 1
    • 0035151587 scopus 로고    scopus 로고
    • Indentation-induced interface delamination of a strong film on a ductile substrate
    • Abdul-Baqi A., and Van der Giessen E. Indentation-induced interface delamination of a strong film on a ductile substrate. Thin Solid Films 381 (2001) 143-154
    • (2001) Thin Solid Films , vol.381 , pp. 143-154
    • Abdul-Baqi, A.1    Van der Giessen, E.2
  • 2
    • 77649193465 scopus 로고
    • The mathematical theory of equilibrium cracks in brittle fracture
    • Academic Press p. 55-129
    • Barenblatt G.I. The mathematical theory of equilibrium cracks in brittle fracture. Adv Appl Mech vol. VII (1962), Academic Press p. 55-129
    • (1962) Adv Appl Mech , vol.VII
    • Barenblatt, G.I.1
  • 3
    • 0031432266 scopus 로고    scopus 로고
    • Cohesive crack model with rate-dependent opening and viscoelasticity: I. Mathematical model and scaling
    • Bazant Z.P., and Li Y.-N. Cohesive crack model with rate-dependent opening and viscoelasticity: I. Mathematical model and scaling. Int J Fract 86 (1997) 247-265
    • (1997) Int J Fract , vol.86 , pp. 247-265
    • Bazant, Z.P.1    Li, Y.-N.2
  • 4
    • 30944436511 scopus 로고
    • Tight-binding potentials for transition metals and alloys
    • Cleri F., and Rosato V. Tight-binding potentials for transition metals and alloys. Phys Rev B 48 (1993) 22-33
    • (1993) Phys Rev B , vol.48 , pp. 22-33
    • Cleri, F.1    Rosato, V.2
  • 5
    • 0025418269 scopus 로고
    • Direct observation and analysis of indentation cracking in glasses and ceramics
    • Cook R.F., and Pharr G.M. Direct observation and analysis of indentation cracking in glasses and ceramics. J Am Ceram Soc 73 (1990) 787-817
    • (1990) J Am Ceram Soc , vol.73 , pp. 787-817
    • Cook, R.F.1    Pharr, G.M.2
  • 6
    • 0030213903 scopus 로고    scopus 로고
    • Effect of out-of-plane properties of a polyimide film on the stress fields in microelectronic structures
    • Dolbow J., and Gosz M. Effect of out-of-plane properties of a polyimide film on the stress fields in microelectronic structures. Mech Mater 23 (1996) 311-321
    • (1996) Mech Mater , vol.23 , pp. 311-321
    • Dolbow, J.1    Gosz, M.2
  • 7
    • 50549180512 scopus 로고
    • Yielding in steel sheets containing slits
    • Dugdale D.S. Yielding in steel sheets containing slits. J Mech Phys Solids 8 (1960) 100-104
    • (1960) J Mech Phys Solids , vol.8 , pp. 100-104
    • Dugdale, D.S.1
  • 8
    • 32344453924 scopus 로고    scopus 로고
    • Two new expanding cavity models for indentation deformations of elastic strain-hardening materials
    • Gao X.-L., Jing X.N., and Subhash G. Two new expanding cavity models for indentation deformations of elastic strain-hardening materials. Int J Solids Struct 43 (2006) 2193-2208
    • (2006) Int J Solids Struct , vol.43 , pp. 2193-2208
    • Gao, X.-L.1    Jing, X.N.2    Subhash, G.3
  • 9
    • 33748532457 scopus 로고    scopus 로고
    • An expanding cavity model incorporating strain-hardening and indentation size effects
    • Gao X.-L. An expanding cavity model incorporating strain-hardening and indentation size effects. Int J Solids Struct 43 (2006) 6615-6629
    • (2006) Int J Solids Struct , vol.43 , pp. 6615-6629
    • Gao, X.-L.1
  • 11
    • 85040875608 scopus 로고
    • Cambridge University Press, Cambridge
    • Johnson K.L. Contact mechanics (1985), Cambridge University Press, Cambridge
    • (1985) Contact mechanics
    • Johnson, K.L.1
  • 13
    • 0021522097 scopus 로고
    • Measurement of adherence of residually stressed thin films by indentation. I. Mechanics of interfacial delamination
    • Marshall D.B., and Evans A.G. Measurement of adherence of residually stressed thin films by indentation. I. Mechanics of interfacial delamination. J Appl Phys 56 (1984) 2632-2638
    • (1984) J Appl Phys , vol.56 , pp. 2632-2638
    • Marshall, D.B.1    Evans, A.G.2
  • 14
    • 0021517474 scopus 로고
    • Measurement of adherence of residually stressed thin films by indentation. II. Experiments with ZnO/Si
    • Marshall D.B., and Evans A.G. Measurement of adherence of residually stressed thin films by indentation. II. Experiments with ZnO/Si. J Appl Phys 56 (1984) 2639-2644
    • (1984) J Appl Phys , vol.56 , pp. 2639-2644
    • Marshall, D.B.1    Evans, A.G.2
  • 16
    • 0030231769 scopus 로고    scopus 로고
    • Computational micromechanics
    • Ortiz M. Computational micromechanics. Comput Mech 18 (1996) 321-338
    • (1996) Comput Mech , vol.18 , pp. 321-338
    • Ortiz, M.1
  • 17
    • 0001357148 scopus 로고
    • Use of the microindentation technique for determining interfacial fracture energy
    • Rosenfeld L.G., Ritter J.E., Lardner T.J., and Lin M.R. Use of the microindentation technique for determining interfacial fracture energy. J Appl Phys 67 (1990) 3291-3295
    • (1990) J Appl Phys , vol.67 , pp. 3291-3295
    • Rosenfeld, L.G.1    Ritter, J.E.2    Lardner, T.J.3    Lin, M.R.4
  • 19
    • 0037039675 scopus 로고    scopus 로고
    • Interfacial toughness measurements for thin films on substrates
    • Volinsky A.A., Moody N.R., and Gerberich W.W. Interfacial toughness measurements for thin films on substrates. Acta Mater 50 (2002) 441-466
    • (2002) Acta Mater , vol.50 , pp. 441-466
    • Volinsky, A.A.1    Moody, N.R.2    Gerberich, W.W.3
  • 20
    • 40849146307 scopus 로고    scopus 로고
    • Volinsky AA, Vella J, Adhihetty IS, Sarihan V, Mercado L, Yeung BH, et al. Microstructure and mechanical properties of electroplated Cu thin films. In: Mat Res Soc Symp Proc 649, 2000. p. Q5.3.
    • Volinsky AA, Vella J, Adhihetty IS, Sarihan V, Mercado L, Yeung BH, et al. Microstructure and mechanical properties of electroplated Cu thin films. In: Mat Res Soc Symp Proc 649, 2000. p. Q5.3.
  • 21
    • 40849117101 scopus 로고    scopus 로고
    • Yang, B. A Boundary element methodology for crack path prediction in brittle materials incorporating the cohesive zone model. Dissertation. Houston: University of Houston; 1998.
    • Yang, B. A Boundary element methodology for crack path prediction in brittle materials incorporating the cohesive zone model. Dissertation. Houston: University of Houston; 1998.
  • 22
    • 0036562961 scopus 로고    scopus 로고
    • Examination of free-edge delamination around an open hole in composite laminates
    • Yang B. Examination of free-edge delamination around an open hole in composite laminates. Int J Fract 115 (2002) 173-191
    • (2002) Int J Fract , vol.115 , pp. 173-191
    • Yang, B.1
  • 23
    • 33845346824 scopus 로고    scopus 로고
    • A novel boundary-domain element method of initial stress, finite deformation and discrete cracks in multilayered anisotropic elastic solids
    • Yang B. A novel boundary-domain element method of initial stress, finite deformation and discrete cracks in multilayered anisotropic elastic solids. Int J Fract 141 (2006) 3-10
    • (2006) Int J Fract , vol.141 , pp. 3-10
    • Yang, B.1
  • 24
    • 0035832305 scopus 로고    scopus 로고
    • A cohesive zone model of fatigue crack growth in quasibrittle materials
    • Yang B., Mall S., and Ravi-Chandar K. A cohesive zone model of fatigue crack growth in quasibrittle materials. Int J Solids Struct 38 (2001) 3927-3944
    • (2001) Int J Solids Struct , vol.38 , pp. 3927-3944
    • Yang, B.1    Mall, S.2    Ravi-Chandar, K.3
  • 25
    • 0036531968 scopus 로고    scopus 로고
    • Efficient evaluation of three-dimensional Green's functions in anisotropic elastostatic multilayered composites
    • Yang B., and Pan E. Efficient evaluation of three-dimensional Green's functions in anisotropic elastostatic multilayered composites. Engng Anal Bound Elem 26 (2002) 355-366
    • (2002) Engng Anal Bound Elem , vol.26 , pp. 355-366
    • Yang, B.1    Pan, E.2
  • 26
    • 0030403729 scopus 로고    scopus 로고
    • On the role of the process zone in dynamic fracture
    • Yang B., and Ravi-Chandar K. On the role of the process zone in dynamic fracture. J Mech Phys Solids 44 (1996) 1955-1976
    • (1996) J Mech Phys Solids , vol.44 , pp. 1955-1976
    • Yang, B.1    Ravi-Chandar, K.2
  • 27
    • 0032636190 scopus 로고    scopus 로고
    • A single-domain dual-boundary-element formulation incorporating a cohesive zone model for elastostatic cracks
    • Yang B., and Ravi-Chandar K. A single-domain dual-boundary-element formulation incorporating a cohesive zone model for elastostatic cracks. Int J Fract 93 (1998) 115-144
    • (1998) Int J Fract , vol.93 , pp. 115-144
    • Yang, B.1    Ravi-Chandar, K.2
  • 28
    • 33845458882 scopus 로고    scopus 로고
    • Efficient Green's function method of line and surface defects in multilayered elastic and piezoelectric materials
    • Yang B., and Tewary V.K. Efficient Green's function method of line and surface defects in multilayered elastic and piezoelectric materials. Comput Model Engng Sci 15 (2006) 165-178
    • (2006) Comput Model Engng Sci , vol.15 , pp. 165-178
    • Yang, B.1    Tewary, V.K.2
  • 29
    • 21344447242 scopus 로고    scopus 로고
    • Cohesive models for damage evolution in laminated composites
    • Yang Q., and Cox B. Cohesive models for damage evolution in laminated composites. Int J Fract 133 (2005) 107-137
    • (2005) Int J Fract , vol.133 , pp. 107-137
    • Yang, Q.1    Cox, B.2
  • 30
    • 0037239905 scopus 로고    scopus 로고
    • Three-dimensional Green's functions for composite laminates
    • Yuan F.G., Yang S., and Yang B. Three-dimensional Green's functions for composite laminates. Int J Solids Struct 40 (2003) 331-342
    • (2003) Int J Solids Struct , vol.40 , pp. 331-342
    • Yuan, F.G.1    Yang, S.2    Yang, B.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.