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Sensors and Actuators, B: Chemical
Volumn 130, Issue 1, 2008, Pages 400-404
Micro gap effect on dilute H2S sensing properties of SnO2 thin film microsensors
Author keywords

Dilute H2S detection; MEMS; Micro gap effect; SnO2 thin film microsensor
Indexed keywords

CHEMICAL SENSORS; MEMS; MICROSENSORS; TIN COMPOUNDS;
EID: 40749148556     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.09.041     Document Type: Article
Times cited : (21)
References (8)
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    • 20344384747 scopus 로고    scopus 로고
    • 3 thick film
    • 3 thick film. MRS Proc. 828 (2005) 25-35
    • (2005) MRS Proc. , vol.828 , pp. 25-35
    • Tamaki, J.1
  • 3
    • 33748065355 scopus 로고    scopus 로고
    • Effect of micro-gap electrode on sensing properties to dilute chlorine gas of indium oxide thin film microsensors
    • Tamaki J., Niimi J., Ogura S., and Konishi S. Effect of micro-gap electrode on sensing properties to dilute chlorine gas of indium oxide thin film microsensors. Sens. Actuators B 117 (2006) 353-358
    • (2006) Sens. Actuators B , vol.117 , pp. 353-358
    • Tamaki, J.1    Niimi, J.2    Ogura, S.3    Konishi, S.4
  • 4
    • 33749371253 scopus 로고    scopus 로고
    • 3 and Au electrode in nanogap semiconductor gas sensors"
    • 3 and Au electrode in nanogap semiconductor gas sensors". MRS Proc. 915 (2006) 197-202
    • (2006) MRS Proc. , vol.915 , pp. 197-202
    • Tamaki, J.1    Niimi, J.2    Konishi, S.3
  • 6
    • 0029346853 scopus 로고
    • Effects of thickness and calcination temperature on tin dioxide sol-derived thin-film sensor
    • Yoo D.J., Tamaki J., Park S.J., Miura N., and Yamazoe N. Effects of thickness and calcination temperature on tin dioxide sol-derived thin-film sensor. J. Electrochem. Soc. 142 (1995) L105-L107
    • (1995) J. Electrochem. Soc. , vol.142
    • Yoo, D.J.1    Tamaki, J.2    Park, S.J.3    Miura, N.4    Yamazoe, N.5

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.