MEMS reliability - Coming of age

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6882, Issue , 2008, Pages

  Douglass, Michael R ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

Accelerated testing; FMEA; MEMS; MOEMS; Reliability; Stress testing

Indexed keywords

ARSENIC COMPOUNDS; COMPOSITE MICROMECHANICS; CONSUMER ELECTRONICS; CONSUMER PRODUCTS; ELECTRONICS INDUSTRY; FABRICATION; MACHINING; MICROANALYSIS; MICROFABRICATION; SEMICONDUCTING INDIUM; TECHNOLOGY; TRANSDUCERS; MICROSYSTEMS; VEGETATION; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICS; OPTICAL DESIGN; PHOTONICS;

AIR BAGS; BIOMEDICAL DEVICES; CONVENTIONAL MANUFACTURING; DIGITAL MICROMIRROR DEVICE (DMD[TRADEMARK]); EMERGING MARKETS; HOMELAND SECURITY (HLS); INK JET PRINTHEADS; MANUFACTURABILITY; MEMS RELIABILITY; MICROFABRICATION PROCESSES; MOBILE MEDIA; RELIABILITY ASSURANCE; ACCELERATED TESTING; DIGITAL MICROMIRROR DEVICE; FMEA; HOME LAND SECURITY; MEMS; MEMS/MOEMS; MOEMS; RELIABILITY; STRESS TESTING; BIO-MEMS; ADVANCED FABRICATION; MICRO/NANO OPTICS;

MICROMACHINING; CONSUMER ELECTRONICS; ADAPTIVE OPTICS; OPTICS;

EID: 40749146394     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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