Epitaxial growth of high quality TiN thin film on Si by laser molecular beam epitaxy

Wuli Xuebao/Acta Physica Sinica

Volumn 57, Issue 2, 2008, Pages 1236-1240

  He, Meng ^a   Liu, Guo Zhen ^a   Qiu, Jie ^a   Xing, Jie ^a   Lu, Hui Bin ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

Epitaxial growth; L MBE; TiN

Indexed keywords

EID: 40749125618     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (18)