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Volumn 516, Issue 11, 2008, Pages 3595-3600
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Crystallization of amorphous Ge films induced by semiconductor diode laser annealing
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Author keywords
Amorphous Ge; Crystallization; Polycrystalline Ge; Semiconductor diode laser
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Indexed keywords
ANNEALING;
CRYSTALLIZATION;
GERMANIUM;
METALLIC FILMS;
SEMICONDUCTOR LASERS;
AMORPHOUS GE;
POLYCRYSTALLINE GE;
SEMICONDUCTOR DIODE LASERS;
AMORPHOUS MATERIALS;
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EID: 40649096842
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2007.08.028 Document Type: Article |
Times cited : (51)
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References (14)
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