Focussed ion beam machined cantilever aperture probes for near-field optical imaging

Journal of Microscopy

Volumn 229, Issue 3, 2008, Pages 503-511

  Jin, E X ^a,b   Xu, X ^a  

^a PURDUE UNIVERSITY   (United States)

^b SEAGATE TECHNOLOGY   (United States)

Author keywords

Aperture; Cantilever probe; FIB; Micro machining; NSOM

Indexed keywords

FABRICATION; ION BEAMS; LIGHT TRANSMISSION; MICROMACHINING; NANOCANTILEVERS; NEAR FIELD SCANNING OPTICAL MICROSCOPY; PROBES; SILICON NITRIDE;

APERTURE; APERTURE PROBES; ATOMIC-FORCE-MICROSCOPY; CANTILEVER PROBE; FOCUSSED ION-BEAMS; MICRO MACHINING; MICROSCOPY SYSTEMS; NANO-APERTURES; NEARFIELD SCANNING OPTICAL MICROSCOPY; OPTICAL RESOLUTION;

ATOMIC FORCE MICROSCOPY;

ALUMINUM; SILICON NITRIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; IMAGING SYSTEM; MECHANICAL PROBE; OPTICAL RESOLUTION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 40549101003     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2008.01935.x     Document Type: Article

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