Influence of the substrate resistivity on the broadband propagation characteristics of silicon transmission lines

54th ARFTG Conference Digest Fall 1999: Automatic RF Techniques Group: Characterization of Broadband Access Technologies, ARFTG Fall 1999

Volumn , Issue , 1999, Pages

  Arz, Uwe ^a   Grabinski, Hartmut ^a   Williams, Dylan F ^b  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC LINES; MICROWAVE MEASUREMENT; WAVE TRANSMISSION;

BROADBAND PROPAGATION; FREQUENCY DEPENDENT; LINE PARAMETERS; SILICON SUBSTRATES; SUBSTRATE CONDUCTIVITY; SUBSTRATE RESISTIVITY;

SUBSTRATES;

EID: 40549093466     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARFTG.1999.327364     Document Type: Conference Paper

References (5)

1. Enno Grotelüschen, Lohit S. Dutta and S. Zaage, "Quasi-analytical Analysis of the Broadband Properties of Multiconductor Transmission Lines on Semiconducting Substrates", IEEE Trans. Components, Packaging, Manufact. Tech., vol. 17, pp. 376-382, Aug. 1994.
2. H. Hasegawa, M. Furokawa, and H. Yanai, "Properties of microstrip lines on Si-SiO2 system", IEEE Trans. Microwave Theory Tech., vol. MTT-19, pp. 869-881, Nov. 1971.
3. D.F. Williams, U. Arz, and H. Grabinski, "Accurate Characteristic Impedance Measurement on Silicon", 1998 IEEE MTT-S Symposium Digest, pp. 1917-1920, June 9-11, 1998.
4. D.F. Williams, R.B. Marks, and A. Davidson, "Comparison of on-wafer calibrations", 38th ARFTG Conference Digest, pp. 68-81, Dec. 1991.
5. R.B. Marks, "A Multiline Method of Network Analyzer Calibration", IEEE Trans. Microwave Theory Tech., vol. MTT-39, no. 7, pp. 1205-1215, July 1991.