Reflectivity enhancement of large m-Qc supermirror by ion polishing

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 529, Issue 1-3 SPEC. ISS., 2004, Pages 73-77

  Soyama, Kazuhiko ^a   Tsunoda, Haruhiko ^b   Murakami, Katsuhiko ^b  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b NIKON CORPORATION   (Japan)

Author keywords

Ion polishing; Neutron; Reflectivity; Supermirror

Indexed keywords

ACCELERATION; ION BEAMS; LIGHT REFLECTION; MIRRORS; NEUTRONS; NICKEL; SPUTTERING; SURFACE ROUGHNESS; TITANIUM; X RAYS;

ION BEAM SPUTTERING (IBS); ION POLISHING; NEUTRON REFLECTOMETRY; SUPERMIRRORS;

NUCLEAR INSTRUMENTATION;

EID: 4043181907     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2004.04.180     Document Type: Conference Paper

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