Ultra thin film sputter depth profiling

Fresenius' Journal of Analytical Chemistry

Volumn 365, Issue 1-3, 1999, Pages 83-84

  Moulder, J F ^a   Bryan, S R ^a   Roll, U ^b  

^a Physical Electronics Inc Minnesota   (United States)

^b Physical Electronics GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4043180090     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002160051449     Document Type: Article

References (4)

1. Hofmann S (1990) In: Briggs D, Seah M (eds) Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, Vol 1. Wiley, Chichester, p 143
2. Wittmaack K (1994) Surf Interface Anal 21 : 323
3. Siegbahn K et al. (1970) Phys Lett A 32 : 221
4. Fadley C, Bergstrom S (1972) In: Shirley D (ed) Electron Spectroscopy. North Holland, Amsterdam, p 233